Specifications
Function
Parameter analyzer — I-V, C-V, pulsed I-V
DC current-voltage range
10 aA to 1 A
DC voltage range
0.2 uV to 210 V
Capacitance-voltage range
1 kHz to 10 MHz, +-30 V DC bias
Pulsed I-V range
+-40 V (80 V p-p), +-800 mA
Pulse sampling
200 MSa/s, 5 ns sampling rate
SMU capacity
Up to 9 medium / high-power SMUs
PMU capacity
Up to 6 dual-channel PMUs
Ground unit
Built-in ground unit
Software
Clarius+ with 450+ application tests
Prober support
MPI, Cascade Microtech, Lucas Labs/Signatone, Wentworth
Cryogenic support
Lake Shore Model 336 temperature controller
Interfaces
USB 2.0/3.0, Ethernet, VGA, Serial, DisplayPort, HDMI
Storage
Solid-state drive for fast boot and data transfer
Mounting
Bench or rack mount
Overview
The Keithley 4200A-SCS is a fully integrated, configurable semiconductor parameter analyzer that synchronizes current-voltage, capacitance-voltage and ultra-fast pulsed I-V characterization in a single mainframe. It is the reference instrument for device, materials and process development where sub-femtoamp resolution and low-noise measurement matter.
A 4200A-SCS mainframe hosts up to nine medium or high-power source-measure units and up to six dual-channel pulse-measure units, so a single chassis can be configured from a two-terminal diode curve tracer up to a multi-terminal wafer-level characterization system. Clarius+ software ships more than 450 ready application tests and supports point-and-click test sequencing.
Key Benefits
Synchronized I-V/C-V/pulsed-I-V in one instrument. 10 aA resolution and 0.2 uV floors for advanced nodes. Full manual and semi-automated wafer-prober ecosystem support
Applications
Wafer-level device and materials characterization; reliability and failure analysis; process development; power-device and wide-bandgap evaluation; R&D labs, universities and foundry QA.
Request a Quote — KEITHLEY 4200A-SCS PARAMETER ANALYZER — SYNCHRONIZED I-V, C-V AND PULSED I-V CHARACTERIZATION
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